The processing flow is dedicated to serve as a flexible CMOS compatible platform for design, process, material and consumable evaluation on scaled superconducting test devices e.g. resonators, capacitors, co-planar waveguides or high kinetic inductance elements. IPMS has established a reliable processing sequence on 300mm industry standard equipment to produce high quality devices with high yield which can serve as a testbed or as prototype vehicle.Wafer size: 200mm, 300mm, Min. CD: ≥ 50nm, LER at min CD: 3nm, Slit width: ≥ 50nm, SC thickness range: